Super-high-pressure mercury lamp (UV-LED)
Provides the ultraviolet radiation necessary for efficient substrate exposure.
Ellipsoidal mirror
Gathers light into a beam.
Dichroic mirror
Reflects only the desired wavelengths of light, and allows unwanted infrared radiation to pass harmlessly through.
Fly-eye lens
Makes the transmitted light intensity uniform.
Spherical mirror
Collimates the transmitted light prior to irradiating substrates.