Manually operated one-shot exposure system with a compact design.
- Manually operated one-shot exposure system for experimentation and research, adaptable to glass, wafers, films and etc. Also ideal for small-lot production.
- Selectable between (soft/hard) contact exposure and proximity exposure
- Adaptable to max. 500mm×500mm substrates. Equipped with an optical system in an optimized combination of a super-high-pressure mercury lamp (500W, 1kW, 2kW or 3.5kW), mirrors, specialty lenses, condenser lenses and etc.
|Substrate size||Max 200 x 200mm ø4″ ～ ø6″||Max 400 x 400mm|
|Light source||Super high-pressure mercury lamp ：500W or 1kW||Super high-pressure mercury lamp ：2kW or 3.5kW|
|Outer dimensions and weights||Main body dimensions||W1240 x D1100 x H1725 mm||W1440 x D1590 x H1882 mm|
|Main body weight||400kg||400kg(including clean fence)|
|Lamp housing weight||－||250kg|
|Optional items||Clean fence, bottom-viewed alignment, hard (vacuum-sealed) contact, auto alignment, special work size such as broken substrates (prior discussion with us is necessary)|
※Custom substrate size, mercury lamp wattage or other special spec available.