Applying the technologies of alignment, parallelism compensation, and positioning control developed in exposure system.
Optionally, encapsulation is also possible in the optimal environment where both  H2O and O2 in a chamber are 1 ppm or less.

Main feature

  • This is one of our “deployed applications” in which our exposure system techniques such as aligning, parallelizing and positioning plates are exerted in bonding a evaporated device glass and a cap glass.
  • Our cluster-unit design concept minimizes environmental changes due to maintenance, etc.
  • Custom system composition is available to best fit the customers’ cap glass, sealant, filler or etc.
  • Inner atmosphere on or below 1 ppm for both H2O and O2 realizes a suitable environment for fabricating organic EL lights/displays.