- Ideal for experiments and research.
- Compact design (600x600mm) that can be installed on a desk.
- UV-LED lamp house standard is mounted. (Effective exposure range is Ø4″)
- Contact exposure type (Other exposure modes are available as options.)
- Fully manual operation and reasonable price.
|Wafer Size||Ø2″ , Ø3″ and max. Ø4″|
|Mask Size||5″ x 5″|
|Alignment Scope||8 times|
|Lamp House||UVLED (365 nm or 405 nm)|
|Illumination Intensity||Max. 14 mW /㎠ (365 nm) or Max. 20 mW /㎠ (405 nm)|