- Light Source
- Provides the ultraviolet radiation necessary for efficient substrate exposure.

- Ellipsoidal mirror
- Gathers light into a beam.

- Dichroic mirror
- Reflects only the desired wavelengths of light, and allows unwanted infrared radiation to pass harmlessly through.

- Fly-eye lens
- Makes the transmitted light intensity uniform.

- Spherical mirror
- Collimates the transmitted light prior to irradiating substrates.
