Manually operated one-shot exposure system with a compact design.
Main feature
- Manually operated one-shot exposure system for experimentation and research, adaptable to glass, wafers, films and etc. Also ideal for small-lot production.
- Selectable between (soft/hard) contact exposure and proximity exposure
- Adaptable to max. 500mm×500mm substrates. Equipped with an optical system in an optimized combination of a super-high-pressure mercury lamp (500W, 1kW, 2kW or 3.5kW), mirrors, specialty lenses, condenser lenses and etc.
Main spec
MA-1200、MA-1400
| MA-1200 | MA-1400 | ||
|---|---|---|---|
| Substrate size | Max 200 x 200mm ø4″ ～ ø6″ | Max 400 x 400mm | |
| Light source | Super high-pressure mercury lamp ：500W or 1kW | Super high-pressure mercury lamp ：2kW or 3.5kW | |
| Outer dimensions and weights | Main body dimensions | W1240 x D1100 x H1725 mm | W1440 x D1590 x H1882 mm |
| Main body weight | 400kg | 400kg(including clean fence) | |
| Lamp housing weight | － | 250kg | |
| Optional items | Clean fence, bottom-viewed alignment, hard (vacuum-sealed) contact, auto alignment, special work size such as broken substrates (prior discussion with us is necessary) | ||
※Custom substrate size, mercury lamp wattage or other special spec available.
