Main feature
- Ideal for experiments and research.
- Compact design (600x600mm) that can be installed on a desk.
- UV-LED lamp house standard is mounted. (Effective exposure range is Ø4″)
- Contact exposure type (Other exposure modes are available as options.)
- Fully manual operation and reasonable price.
Main spec
| DA-1000 | |
|---|---|
| Wafer Size | Ø2″ , Ø3″ and max. Ø4″ |
| Mask Size | 5″ x 5″ |
| Alignment Scope | 8 times |
| Lamp House | UVLED (365 nm or 405 nm) |
| Illumination Intensity | Max. 14 mW /㎠ (365 nm) or Max. 20 mW /㎠ (405 nm) |
