Non-contact type proximity exposure system equipped with edge sensors and gap sensors. Ideal for mass-production of touchscreens or organic EL displays.
Main feature
- Capable of high speed exposure process at an approx. 20-second tact time (assuming a standard machine setup with the alignment tolerance set to 0.5μm , excluding exposing time)
- Capable of making a proximity gap with high speed & accuracy by a direct-reading gap sensors and our original control system
- An environmental chamber that strictly controls the temperature of the processing part is prepared. Also. a substrate stage thermocontroller to prevent heat expansion/shrinkage of substrates is optionally available.
- To prevent expansion/shrinkage by temperature difference between a mask and a glass substrate, a substrate stage thermocontroller and a mask cooling system are available (optional).
- A mask library storing up to 5 masks can be integrated.
Main spec
| MA-5501ML | MA-5701ML | MA-5111ML | ||
|---|---|---|---|---|
| Substrate size | 370 x 470mm | 550 x 650mm | 730 x 920mm | |
| Alignment | Non-contact pre-alignment to auto alignment available | |||
| Gap | With sensing capability | |||
| Light source | Super high-pressure mercury lamp：2kW or 3.5kW or 5kW | Super high-pressure mercury lamp：10kW | Super high-pressure mercury lamp：18kW | |
| Outer dimensions and weights | Main body weight | W2400 x D2480 x H2290mm (Complete with a separate main control box, a spot air conditioner and a circulator.) |
W3600 x D3870 x H2500mm (Complete with a separate main control box, a spot air conditioner and a circulator.) |
W7450 x D5000 x H3600mm (Complete with a separate main control box, a spot air conditioner and a circulator.) |
| Main body weight | 1500kg | 1900kg | 2000kg | |
| Lamp housing weight | 500kg | 1100kg | 3500kg | |
| Clean fence weight | 250kg | 300kg | ||
| Optional items | Mask cooling, substrate stage thermocontroller, thermal chamber, special alignment illumination | |||
| Use | Fabricating touchscreens, color filters, organic EL, C-STN, electronic papers or etc. | |||
※Custom substrate size, mercury lamp wattage or other special spec available.
