Main feature
- Original mirror optical system lamp housing integrated,realizing uniform in-plane irradiation and high irradiance.
- Original coaxial alignment method and high speed image processing technique employed realizing high precision alignment. Also compatible with IR or backside-view method.
- Original optical gap sensors enable making a desired mask-wafer proximity gap contactlessly with high speed & accuracy.
- Mask changer integrated changing Max. 20 photomasks automatically.
- Max. 3 load ports can be mounted.
Main spec
| MA-5301ML | |
|---|---|
| Wafer size | Ø300ｍｍ |
| Alignment | Non-contact pre-alignment to auto alignment available |
| Light source | Super high-pressure mercury lamp：3.5kW |
| Main body dimensions | W 2450 × D 2400 × H 2300 mm |
※Custom substrate size, mercury lamp wattage or other special spec available.
