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Ideal collimated lightideal collimated lights

The most prominent features of our optical technology are:

  • Wide area collimated light source, making full use of the large mirror optical system.
  • Idealized optical system layout, to take advantage of our unique optical designs.
  • Uniform high-intensity illumination, provided by the unique lens structure of the optical system.

These advanced features are made possible by research and development of the following:

  • Super-high-pressure mercury lamp offering high-intensity output. (However, even dual lamps can be accommodated.)
  • Fly-eye lens embodying our unique design and manufacturing methods (patent held by Japan Science Engineering).
  • High reflectivity mirrors

The implementation of our innovative and ingenious technology enables large areas to be uniformly illuminated at high intensity, resulting in superior transfer precision during exposure.

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