- Super-high-pressure mercury lamp (UV-LED)
- Provides the ultraviolet radiation necessary for efficient substrate exposure.
- Ellipsoidal mirror
- Gathers light into a beam.
- Dichroic mirror
- Reflects only the desired wavelengths of light, and allows unwanted infrared radiation to pass harmlessly through.
- Fly-eye lens
- Makes the transmitted light intensity uniform.
- Spherical mirror
- Collimates the transmitted light prior to irradiating substrates.
