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Structure of lamp housings
1.Super-high-pressure mercury lamp
Provides the ultraviolet radiation necessary for efficient substrate exposure.
Provides the ultraviolet radiation necessary for efficient substrate exposure.
 
2.Ellipsoidal mirror
Gathers light into a beam.
Ellipsoidal mirror
 
3.Dichroic mirror
Reflects only the desired wavelengths of light, and allows unwanted infrared radiation to pass harmlessly through.
Dichroic mirror
 
4.Fly-eye lens
Makes the transmitted light intensity uniform.
Fly-eye lens
 
5.Spherical mirror
Collimates the transmitted light prior to irradiating substrates.
Spherical mirror
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