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Exposure system for other mass production

Exposure system that prints patterns on photoresist-coated substrates aligned with a mask.

Main feature
  • Automatic proximity exposure system capable of exposing a substrate in its full exposure area at a time.
  • Custom machine composition is available such as C-STN, STN, ceramic capacitor, thermal heads or etc. to meet the customers' requests.
  • Auto alignment feature implemented. (MA-4000)
化合物半導体用露光装置

MA-2000~4000series

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